Problem drytek2 SNF 2011-11-28 15:39:57: SF6 etch doesn't work for Tray 5 from top

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Nov 28 15:39:58 PST 2011


Tray appears dark whereas all other trays have plasma.  (Doesn't seem to be a problem w/ CF4 though).




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