From sclaussen at snf.stanford.edu Fri Oct 14 10:49:38 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 14 Oct 2011 10:49:38 -0700 Subject: Problem drytek2 SNF 2011-10-14 10:49:38: process not starting Message-ID: Had to press "Micro Reset" after turning off "Standby" to get i\the chamber to vent initially. Then after setting everything up and starting the process, it never actually started. It's possible I'm missing something simple, but I think I followed all the steps in the binder... From latta at snf.stanford.edu Fri Oct 14 11:56:56 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:56:56 -0700 Subject: Shutdown drytek2 SNF 2011-10-14 11:56:56: not reaching cross-over Message-ID: After waiting 5 mins the pressure had stalled at 23.6 Also, needed to use micro reset to get out of standby and vent. From eenriquez at snf.stanford.edu Fri Oct 14 14:43:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:43:23 -0700 Subject: Shutdown drytek2 SNF 2011-10-14 11:56:56: not reaching cross-over Message-ID: no problem found. Ran ran process 3 times with no problem. The time from pressing Cycle Start until process started was about 20 sec. From eenriquez at snf.stanford.edu Fri Oct 14 14:43:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:43:33 -0700 Subject: Problem drytek2 SNF 2011-10-14 10:49:38: process not starting Message-ID: no problem found. Ran ran process 3 times with no problem. The time from pressing Cycle Start until process started was about 20 sec. From cachang at snf.stanford.edu Mon Oct 17 11:53:07 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Mon, 17 Oct 2011 11:53:07 -0700 Subject: Comment drytek2 SNF 2011-10-17 11:53:07: timer Message-ID: It seems like the timer has some problems. I used process 2, and set the timer to be 1min. For several test run, the process did not stop after 1min. Have to use manual stop. From mzhang2 at snf.stanford.edu Tue Oct 18 10:45:17 2011 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Tue, 18 Oct 2011 10:45:17 -0700 Subject: Problem drytek2 SNF 2011-10-18 10:45:17: fail to turn on SF6 gas Message-ID: I switch the Whitey valve to the ON position and tune the DIP rocker switch properly, but still I cannot turn on the SF6 gas by tuning the gas flow knob. From eenriquez at snf.stanford.edu Thu Oct 20 08:50:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 Oct 2011 08:50:07 -0700 Subject: Problem drytek2 SNF 2011-10-18 10:45:17: fail to turn on SF6 gas Message-ID: No problem found. Turned on the SF6 valve and ran an SF6 plasma several times with no problems. From eenriquez at snf.stanford.edu Thu Oct 20 08:56:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 Oct 2011 08:56:03 -0700 Subject: Problem drytek2 SNF 2011-10-20 08:56:02: Timer for Process 2 is defective Message-ID: The 0-9 minute dial is not functioning. Need to replace the dial switch. From lindaw at snf.stanford.edu Mon Oct 24 11:54:44 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 Oct 2011 11:54:44 -0700 Subject: Problem drytek2 SNF 2011-10-24 11:54:44: bracket holding gas inlet line to front door broken Message-ID: The small steel spring clamp that holds the gas inlet line to the top of the front door is broken. Also, the process 2 timer set at 2 min is working fine. From mdickey at snf.stanford.edu Wed Oct 26 05:24:17 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 05:24:17 -0700 Subject: Shutdown drytek2 SNF 2011-10-26 05:24:16: water Message-ID: down for flowmeter tie in From mdickey at snf.stanford.edu Wed Oct 26 09:09:02 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 09:09:02 -0700 Subject: Shutdown drytek2 SNF 2011-10-26 05:24:16: water Message-ID: tie in done From npapte at snf.stanford.edu Thu Oct 27 17:22:19 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:22:19 -0700 Subject: Shutdown drytek2 SNF 2011-10-27 17:22:18: RF matching for process 1 not working Message-ID: From latta at snf.stanford.edu Thu Oct 27 17:48:54 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:48:54 -0700 Subject: Comment drytek2 SNF 2011-10-27 17:48:53: Tried to get RF running Message-ID: and failed. I set the matching network to the last O2 100, 150mT, 500W recipe. I could not get the forward higher than 89 and the reflected was 75. No manner of tweaking changed any of that. And.... I smelled the typical burnt plastic smell. RF fried again? I know the people using the tool before the shutdown notice were running the forward quite high.... From cbaxter at snf.stanford.edu Thu Oct 27 18:27:59 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 Oct 2011 18:27:59 -0700 Subject: Comment drytek2 SNF 2011-10-27 18:27:58: Update Message-ID: Hooked up generator into a dummy load w/out problem. The problem is on the auto match, need to troubleshoot furthrer. From mdickey at snf.stanford.edu Fri Oct 28 11:00:51 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 11:00:51 -0700 Subject: Comment drytek2 SNF 2011-10-28 11:00:50: cap Message-ID: The matching network has a bad capacitor. Waiting for Jim McV to bring us one From eenriquez at snf.stanford.edu Fri Oct 28 14:29:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:29:25 -0700 Subject: Shutdown drytek2 SNF 2011-10-27 17:22:18: RF matching for process 1 not working Message-ID: Replaced a burnt out 50pf capacitor in the matching network. Ran O2 clean at over 500 Watts. From eenriquez at snf.stanford.edu Fri Oct 28 14:29:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:29:31 -0700 Subject: Comment drytek2 SNF 2011-10-27 18:27:58: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 28 14:29:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:29:45 -0700 Subject: Comment drytek2 SNF 2011-10-28 11:00:50: cap Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 28 14:30:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:30:43 -0700 Subject: Comment drytek2 SNF 2011-10-27 17:48:53: Tried to get RF running Message-ID: Replaced burnt out 50 pf capacitor in the matching network. From mzhang2 at snf.stanford.edu Fri Oct 28 17:42:48 2011 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Fri, 28 Oct 2011 17:42:48 -0700 Subject: Shutdown drytek2 SNF 2011-10-28 17:42:48: no SF6 gas/system not pumping Message-ID: when first start the cycle, no SF6 gas; when I tried to stop the process and pump the system before leaving, the system just didn't respond From cbaxter at snf.stanford.edu Fri Oct 28 18:38:02 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 28 Oct 2011 18:38:02 -0700 Subject: Shutdown drytek2 SNF 2011-10-28 17:42:48: no SF6 gas/system not pumping Message-ID: Ran process#2 (poly etch) and flowed Sf6 at 117sccm w/out for 5mins. From cbaxter at snf.stanford.edu Fri Oct 28 18:44:54 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 28 Oct 2011 18:44:54 -0700 Subject: Comment drytek2 SNF 2011-10-17 11:53:07: timer Message-ID: From eenriquez at snf.stanford.edu Mon Oct 31 10:11:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Oct 2011 10:11:14 -0700 Subject: Problem drytek2 SNF 2011-10-24 11:54:44: bracket holding gas inlet line to front door broken Message-ID: Replaced broken tube clamp.