Problem drytek2 SNF 2011-10-18 10:45:17: fail to turn on SF6 gas

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 20 08:50:07 PDT 2011


No problem found.  Turned on the SF6 valve and ran an SF6 plasma several times with no problems.




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