Shutdown drytek2 SNF 2011-10-28 17:42:48: no SF6 gas/system not pumping

mzhang2 at snf.stanford.edu mzhang2 at snf.stanford.edu
Fri Oct 28 17:42:48 PDT 2011


when first start the cycle, no SF6 gas; when I tried to stop the process and pump the system before leaving, the system just didn't respond




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