Shutdown drytek2 SNF 2011-10-28 17:42:48: no SF6 gas/system not pumping

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Oct 28 18:38:02 PDT 2011


Ran process#2 (poly etch) and flowed Sf6 at 117sccm w/out
for 5mins.




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