From latta at snf.stanford.edu Fri Sep 2 11:12:12 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 11:12:12 -0700 Subject: Comment drytek2 SNF 2011-09-02 11:12:12: New Power Supply- New Instructions! Message-ID: Folks, After many hours of work and head scratching Jim McVittie has installed a new RF power supply that will go to full power and tune nicely. There are, however, new instructions for turning on and tuning the power supply. Please see below. The instructions will be posted on the etcher and noted in the operation instructions at the tool. This may be a temporary state as we may be ordering a newer more powerful RF power supply. Turn on POWER on the RF power supply. The following buttons should be on; FORWARD POWER REMOTE CONTROL REMOTE SIGNAL The following buttons should be off; RIGHT DISPLAY LEFT DISPLAY SETPOINT When the plasma is on RF ON should be lit. When the plasma is off RF should be lit. Tuning; Adjust the coil pot only. Use the bird meter (located above the tuning pots). Make sure the arrow is pointing left. The old black box on the loading station may be used for gross tuning. The most accurate froward and reverse power readings are on the power supply itself. Write down the numbers on the coil and cap pots so that you can get close to perfect tuning the next time you use the etcher. From mcvittie at snf.stanford.edu Fri Sep 2 11:59:49 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 2 Sep 2011 11:59:49 -0700 Subject: Problem drytek2 SNF 2011-06-24 17:33:14: unable to reach 500W for Process#1 Message-ID: Installed new AE RFX-600 generator. Although it is a 600w supply, I set the max output power to 530w. I also made some adjustments to the matching network. I changed the Bird meter so it can accurately read the reflected power. I calibrated the black box read outs but was unable to adjust the zero reading for the reflected power meter, which has a zero reading of about 5 w. Please use the Bird meter for fine tuning the reflected power. You can use the black box reflected power reading if the bird meter is out of range. I found that from one run to the next a slight adjustment of the coil pot will bring the reflected power back to near the min if the processs had previously tuned out during your test run. Nancy is writing up new procedures for using the new rf generator. Jim From latta at snf.stanford.edu Fri Sep 2 12:05:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 12:05:35 -0700 Subject: Comment drytek2 SNF 2011-09-02 12:05:35: Power supply installed Message-ID: Installed new AE RFX-600 generator. Although it is a 600w supply, I set the max output power to 530w. I also made some adjustments to the matching network. I changed the Bird meter so it can accurately read the reflected power. I calibrated the black box read outs but was unable to adjust the zero reading for the reflected power meter, which has a zero reading of about 5 w. Please use the Bird meter for fine tuning the reflected power. You can use the black box reflected power reading if the bird meter is out of range. I found that from one run to the next a slight adjustment of the coil pot will bring the reflected power back to near the min if the processs had previously tuned out during your test run. Nancy is writing up new procedures for using the new rf generator. Jim From latta at snf.stanford.edu Fri Sep 2 12:06:33 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 12:06:33 -0700 Subject: Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and Message-ID: new power supply should address onouniformity issue. From latta at snf.stanford.edu Fri Sep 2 12:07:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 12:07:55 -0700 Subject: Comment drytek2 SNF 2011-08-17 16:31:39: Update Message-ID: new power supply installed From latta at snf.stanford.edu Fri Sep 2 12:08:59 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 12:08:59 -0700 Subject: Comment drytek2 SNF 2011-08-18 14:57:17: Drytek2 -- Bad RF Connector Message-ID: new power supply should address all these issues From latta at snf.stanford.edu Fri Sep 2 14:59:53 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 14:59:53 -0700 Subject: Problem drytek2 SNF 2011-09-02 14:59:53: Poly Etch Rate = 1227 Message-ID: Used standard recipe. From mcvittie at snf.stanford.edu Fri Sep 2 14:59:54 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 2 Sep 2011 14:59:54 -0700 Subject: Comment drytek2 SNF 2011-09-02 11:12:12: New Power Supply- New Instructions! Message-ID: From latta at snf.stanford.edu Fri Sep 2 15:11:59 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 15:11:59 -0700 Subject: Problem drytek2 SNF 2011-09-02 14:59:53: Poly Etch Rate = 1227 Message-ID: ok ok not a problem, except that I put in the wrong ER...... From latta at snf.stanford.edu Fri Sep 2 15:13:47 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 15:13:47 -0700 Subject: Comment drytek2 SNF 2011-09-02 15:13:46: Poly etch rate = 1621A/min Message-ID: Used standard program. From latta at snf.stanford.edu Fri Sep 2 15:15:20 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 15:15:20 -0700 Subject: Comment drytek2 SNF 2011-09-02 15:15:20: New Power Supply- New Instructions! Message-ID: Folks, After many hours of work and head scratching Jim McVittie has installed a new RF power supply that will go to full power and tune nicely. There are, however, new instructions for turning on and tuning the power supply. Please see below. The instructions will be posted on the etcher and noted in the operation instructions at the tool. This may be a temporary state as we may be ordering a newer more powerful RF power supply. Turn on POWER on the RF power supply. The following buttons should be on; FORWARD POWER REMOTE CONTROL REMOTE SIGNAL The following buttons should be off; RIGHT DISPLAY LEFT DISPLAY SETPOINT When the plasma is on RF ON should be lit. When the plasma is off RF should be lit. Tuning; Adjust the coil pot only. Use the bird meter (located above the tuning pots). Make sure the arrow is pointing left. The old black box on the loading station may be used for gross tuning. The most accurate froward and reverse power readings are on the power supply itself. Write down the numbers on the coil and cap pots so that you can get close to perfect tuning the next time you use the etcher. From tomada at snf.stanford.edu Tue Sep 6 16:59:28 2011 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Tue, 6 Sep 2011 16:59:28 -0700 Subject: Shutdown drytek2 SNF 2011-09-06 16:59:28: Burning smell using process 2 Message-ID: I satrted the machine with my usual recipe and when the power came up it was very high tried to take it down with the RF level and then with the coil but a burning smell strted then the power went down. Decided to shut down the run right away. No other nobs were touched and the power supplay had the correct light /buttons on. Not sure what happend. From mcvittie at snf.stanford.edu Tue Sep 6 17:09:39 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 6 Sep 2011 17:09:39 -0700 Subject: Shutdown drytek2 SNF 2011-09-06 17:09:38: Drytek2 -- RF Burnt Out Message-ID: User ran reflected power to high and burnt out the output stage of generator. Jim From cbaxter at snf.stanford.edu Wed Sep 7 10:24:48 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 7 Sep 2011 10:24:48 -0700 Subject: Comment drytek2 SNF 2011-09-07 10:24:47: Generator Message-ID: Installed back OEM6 rf generator, Jim M. need to make an adjustment on the external control box.. From latta at snf.stanford.edu Thu Sep 8 14:41:48 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:41:48 -0700 Subject: Comment drytek2 SNF 2011-09-02 12:05:35: Power supply installed Message-ID: old supply back From latta at snf.stanford.edu Thu Sep 8 14:42:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:42:15 -0700 Subject: Comment drytek2 SNF 2011-09-02 15:13:46: Poly etch rate = 1621A/min Message-ID: etch rate will change again as old supply is back From latta at snf.stanford.edu Thu Sep 8 14:42:38 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:42:38 -0700 Subject: Comment drytek2 SNF 2011-09-02 15:15:20: New Power Supply- New Instructions! Message-ID: old supply back From latta at snf.stanford.edu Thu Sep 8 14:42:52 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:42:52 -0700 Subject: Shutdown drytek2 SNF 2011-09-06 16:59:28: Burning smell using process 2 Message-ID: reaplaced old supply From latta at snf.stanford.edu Thu Sep 8 14:43:37 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:43:37 -0700 Subject: Shutdown drytek2 SNF 2011-09-06 17:09:38: Drytek2 -- RF Burnt Out Message-ID: old supply replaced, new operating instructions From latta at snf.stanford.edu Thu Sep 8 14:43:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:43:55 -0700 Subject: Comment drytek2 SNF 2011-09-07 10:24:47: Generator Message-ID: adjustments made. From latta at snf.stanford.edu Thu Sep 8 14:44:22 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Sep 2011 14:44:22 -0700 Subject: Problem drytek2 SNF 2011-09-08 14:44:22: New operating instructions Message-ID: Attention: Before you use drytek2 please read the new operating instructions located in the blue book. They contain a new, as of 9/8/2011, RF tuning procedure. The changes have been underlined to highlight them. You will notice that the old RF power supply is back. At this time it will not go any higher than 400W. Expect etch rates to have decreased. A new power supply is on order so drytek2 should be able to deliver 500 total watts. We will let you know when it has been installed. The new tuning procedure will remain in place. In addition, there is a new log form for you to fill out at the end of the etch. You will be asked for the coil and cap settings. They can be found by looking on the coil and cap tuning pots (the black knobs used to tune the RF). We want to collect this information so that users of the tool can refer back to the last settings used for a given recipe and plug them in to ease the RF tuning procedure. Lastly, we are requiring the labmembers turn the RF power level to zero after using the tool. This will limit wear and tear on the RF power supply. We also ask that users tune the RF at a much lower power (40W) before turning the RF to the full power desired. This procedure is covered in the new operating instructions. Team Etch From eenriquez at snf.stanford.edu Fri Sep 9 10:39:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:39:17 -0700 Subject: Shutdown drytek2 SNF 2011-09-09 10:39:17: Installing new generator Message-ID: From mcvittie at snf.stanford.edu Fri Sep 9 11:24:29 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 9 Sep 2011 11:24:29 -0700 Subject: Shutdown drytek2 SNF 2011-09-09 11:24:28: Drytek2 -- New Supply only gives 200w for O2 Message-ID: This supply was tested offline to put out 800w. I will look into the problem after lunch. Worst case will be going back to old supply which puts out 400w. Jim From eenriquez at snf.stanford.edu Fri Sep 9 11:58:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Sep 2011 11:58:21 -0700 Subject: Shutdown drytek2 SNF 2011-09-09 10:39:17: Installing new generator Message-ID: Installed new generator. Now ready for Jim From mcvittie at snf.stanford.edu Sat Sep 10 10:48:42 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sat, 10 Sep 2011 10:48:42 -0700 Subject: Shutdown drytek2 SNF 2011-09-09 11:24:28: Drytek2 -- New Supply only gives 200w for O2 Message-ID: Corrected AC wiring problem, fitted short in control box and put back on the old "400w" supply. Need to add safety cover to remote/local switch on new supply before it can be put onto the system. Jim From lindaw at snf.stanford.edu Wed Sep 14 12:49:30 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 14 Sep 2011 12:49:30 -0700 Subject: Comment drytek2 SNF 2011-09-14 12:49:28: pumpdown to crossover pressure a little slow Message-ID: It is taking longer than usual to reach 19.5mT. From eenriquez at snf.stanford.edu Wed Sep 14 14:22:38 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Sep 2011 14:22:38 -0700 Subject: Comment drytek2 SNF 2011-09-14 14:22:37: New rf generator Message-ID: Installed new rf generator. System is now capable of putting out full power. From latta at snf.stanford.edu Wed Sep 14 16:17:39 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:17:39 -0700 Subject: Comment drytek2 SNF 2011-09-14 16:17:38: Crossover is very slow.... Message-ID: First puppdown didn't make it after 10 mins. Micro reset and the next time took about 5 min. From latta at snf.stanford.edu Wed Sep 14 16:23:36 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:23:36 -0700 Subject: Problem drytek2 SNF 2011-09-14 16:23:35: Electrodes need balancing Message-ID: Ran Poly Etch for 2 mins and got the following etch rates per min; Electrode #1 = 1639 #2 = 2117 #3 = 1977 #4 = 1846 #5 = 1860 #6 = 1647 Uniformity within a wafer not good, either. From ysohn at snf.stanford.edu Thu Sep 15 09:37:10 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Thu, 15 Sep 2011 09:37:10 -0700 Subject: Problem drytek2 SNF 2011-09-15 09:37:09: control panel Message-ID: some strage problem was observed while controlling the equipment when I turned off the standby putton by pushing that button, it did not work for the first time so I had to try again. when I tried to run descum process, it did not work for the first time either, so I tried again and it worked without problem. From latta at snf.stanford.edu Thu Sep 15 14:52:22 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Sep 2011 14:52:22 -0700 Subject: Problem drytek2 SNF 2011-09-15 14:52:22: Ceramic piece sandwiched between.... Message-ID: the Al on electrode #2 is not squared. It pokes out a bit. From eenriquez at snf.stanford.edu Fri Sep 16 13:32:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Sep 2011 13:32:08 -0700 Subject: Problem drytek2 SNF 2011-09-15 14:52:22: Ceramic piece sandwiched between.... Message-ID: Straightened out ceramic piece From eenriquez at snf.stanford.edu Fri Sep 16 13:32:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Sep 2011 13:32:57 -0700 Subject: Problem drytek2 SNF 2011-09-15 09:37:09: control panel Message-ID: No problem found. Control panel operated normally. From cachang at snf.stanford.edu Sun Sep 18 15:02:14 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 18 Sep 2011 15:02:14 -0700 Subject: Problem drytek2 SNF 2011-09-18 15:02:14: Machine not working Message-ID: Tried Process 2 for silicon etch After pressing cycle start, I waited for 5 mins, but the process did not start. (no pressure change, no gas flow and no RF power) From eenriquez at snf.stanford.edu Mon Sep 19 10:26:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Sep 2011 10:26:33 -0700 Subject: Problem drytek2 SNF 2011-09-18 15:02:14: Machine not working Message-ID: Turned the roots blower back on. From mcvittie at snf.stanford.edu Wed Sep 21 18:31:13 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 21 Sep 2011 18:31:13 -0700 Subject: Problem drytek2 SNF 2011-09-14 16:23:35: Electrodes need balancing Message-ID: For the poly etch process, I have greatly improved the electode to electrode balancing. I still have more work to do but the balanceing now is reasonable.. The follow measurements show the % difference from the mean for the center of wafer etch rate. Jim #1 -3% #2 +1.4% #3 -1.1% #4 -0.5% #5 +1.3% #6 +1.9% From cachang at snf.stanford.edu Sun Sep 25 13:58:10 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 25 Sep 2011 13:58:10 -0700 Subject: Problem drytek2 SNF 2011-09-25 13:58:09: machine not working Message-ID: I tried to run process 2 with SF6 only, but there were no gas flows and the pressure knob was not working, either. From eenriquez at snf.stanford.edu Mon Sep 26 11:41:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Sep 2011 11:41:44 -0700 Subject: Problem drytek2 SNF 2011-09-25 13:58:09: machine not working Message-ID: No problem found. From eenriquez at snf.stanford.edu Tue Sep 27 08:50:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Sep 2011 08:50:41 -0700 Subject: Comment drytek2 SNF 2011-09-14 16:17:38: Crossover is very slow.... Message-ID: Added oil to the pump. Now crosses over in 20 sec. From eenriquez at snf.stanford.edu Tue Sep 27 08:50:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Sep 2011 08:50:47 -0700 Subject: Comment drytek2 SNF 2011-09-14 12:49:28: pumpdown to crossover pressure a little slow Message-ID: Added oil to the pump. Now crosses over in 20 sec. From latta at snf.stanford.edu Wed Sep 28 15:10:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Sep 2011 15:10:00 -0700 Subject: Comment drytek2 SNF 2011-09-14 14:22:37: New rf generator Message-ID: archived From latta at snf.stanford.edu Wed Sep 28 15:19:44 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Sep 2011 15:19:44 -0700 Subject: Comment drytek2 SNF 2011-09-28 15:19:43: Contaminated wafers allowed in electrodes 5&6 Message-ID: Drytek1, after almost three decades of service, has been decommissioned and rolled out of the lab. So from today, the bottom two electrodes are for contaminated work. This will allow for a new Oxford etcher to be placed in the lab. From latta at snf.stanford.edu Wed Sep 28 16:47:07 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Sep 2011 16:47:07 -0700 Subject: Comment drytek2 SNF 2011-09-28 16:47:06: New quals posted on wiki Message-ID: New quals run after the RF power supply rebuild. https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications