Comment drytek2 SNF 2011-09-02 15:13:46: Poly etch rate = 1621A/min
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Sep 2 15:13:47 PDT 2011
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Problem drytek2 SNF 2011-09-02 14:59:53: Poly Etch Rate = 1227
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Comment drytek2 SNF 2011-09-02 15:13:46: Poly etch rate = 1621A/min
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Used standard program.
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Problem drytek2 SNF 2011-09-02 14:59:53: Poly Etch Rate = 1227
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Comment drytek2 SNF 2011-09-02 15:13:46: Poly etch rate = 1621A/min
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