Problem drytek2 SNF 2011-09-14 16:23:35: Electrodes need balancing

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 14 16:23:36 PDT 2011


Ran Poly Etch for 2 mins and got the following etch rates per min;
Electrode #1 = 1639
#2 = 2117
#3 = 1977
#4 = 1846
#5 = 1860
#6 = 1647
Uniformity within a wafer not good, either.




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