Problem drytek2 SNF 2011-09-18 15:02:14: Machine not working

cachang at snf.stanford.edu cachang at snf.stanford.edu
Sun Sep 18 15:02:14 PDT 2011


Tried Process 2 for silicon etch
After pressing cycle start, I waited for 5 mins, but the process did not start. (no pressure change, no gas flow and no RF power)




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