Problem drytek2 SNF 2011-09-14 16:23:35: Electrodes need balancing

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Wed Sep 21 18:31:13 PDT 2011


For the poly etch process, I have greatly improved the electode to electrode balancing. I still have more work to do but the balanceing now is reasonable.. The follow measurements show the % difference from the mean for the  center of wafer etch rate.   Jim 
#1  -3%
#2   +1.4%
#3  -1.1%
#4  -0.5%
#5  +1.3%
#6 +1.9%




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