Comment drytek2 SNF 2011-09-28 15:19:43: Contaminated wafers allowed in electrodes 5&6

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 28 15:19:44 PDT 2011


Drytek1, after almost three decades of service, has been decommissioned and rolled out of the lab.  So from today, the bottom two electrodes are for contaminated work.
This will allow for a new Oxford etcher to be placed in the lab.




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