Comment drytek2 SNF 2011-09-28 16:47:06: New quals posted on wiki

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 28 16:47:07 PDT 2011


New quals run after the RF power supply rebuild.
https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications




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