From cmcg at snf.stanford.edu Sat Apr 7 11:20:24 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 7 Apr 2012 11:20:24 -0700 Subject: Problem drytek2 SNF 2012-04-07 11:20:23: no CF4 flow Message-ID: running process 3, contact cleanup. made sure valve in back was open, gas 1 selected, process 3 light on. No response to adjusting the gas flow POT either. From cbaxter at snf.stanford.edu Sat Apr 7 12:48:33 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Apr 2012 12:48:33 -0700 Subject: Problem drytek2 SNF 2012-04-07 11:20:23: no CF4 flow Message-ID: Toggled on/off switch on mfc controller, flowed CF4 at 100% w/out problem. From alsune at snf.stanford.edu Wed Apr 11 23:26:56 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 11 Apr 2012 23:26:56 -0700 Subject: Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly Message-ID: Upon using nitride recipe, found that the top slot is not etching the nitride layer uniformly. When the same sample is using on the second slot it etched ok. From latta at snf.stanford.edu Thu Apr 12 14:13:18 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 12 Apr 2012 14:13:18 -0700 Subject: Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly Message-ID: Not sure what the reporting labmember observed. I ran a 1min nitride test of electrodes 1 & 2 and found that electrode 1 was more uniform. Difference between min and max for #1 =51A, for #2 = 64A. Average ER's within about 6%, acceptable for this old dear of an etcher..... From latta at snf.stanford.edu Thu Apr 12 14:14:13 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 12 Apr 2012 14:14:13 -0700 Subject: Comment drytek2 SNF 2012-02-15 09:15:42: Completed monthly PM Message-ID: archived From mzhang2 at snf.stanford.edu Wed Apr 25 16:46:17 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Wed, 25 Apr 2012 16:46:17 -0700 Subject: Problem drytek2 SNF 2012-04-25 16:46:17: cannot turn on SF6 Message-ID: already open the SF6 valve, also set the right position in switch board, still SF6 cannot be turned on From eenriquez at snf.stanford.edu Wed Apr 25 17:14:56 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Apr 2012 17:14:56 -0700 Subject: Problem drytek2 SNF 2012-04-25 16:46:17: cannot turn on SF6 Message-ID: The switch on the MFC controller was in the off position. Placed switch in the auto position and tested with no problems. Please leave all the mfc controller in the auto position. From raneeyoo at snf.stanford.edu Thu Apr 26 01:50:17 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Thu, 26 Apr 2012 01:50:17 -0700 Subject: Problem drytek2 SNF 2012-04-26 01:50:16: no rf power Message-ID: somehow, i was not able to get rf power when i tried to turn on the rf power. From gyama at snf.stanford.edu Thu Apr 26 06:15:11 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 26 Apr 2012 06:15:11 -0700 Subject: Comment drytek2 SNF 2012-04-26 06:15:10: seems OK now, 500W Message-ID: From eenriquez at snf.stanford.edu Thu Apr 26 08:06:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Apr 2012 08:06:27 -0700 Subject: Problem drytek2 SNF 2012-04-26 01:50:16: no rf power Message-ID: Unable to duplicate the problem. Please check if the RF power level setting is not at 0 watts.