Problem drytek2 SNF 2012-04-07 11:20:23: no CF4 flow

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Sat Apr 7 11:20:24 PDT 2012


running process 3, contact cleanup. made sure valve in back was open, gas 1 selected, process 3 light on. No response to adjusting the gas flow POT either.




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