Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly

alsune at snf.stanford.edu alsune at snf.stanford.edu
Wed Apr 11 23:26:56 PDT 2012


Upon using nitride recipe,
found that the top slot is not etching the nitride layer uniformly. When the same sample is using on the second slot it etched ok.




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