Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Apr 12 14:13:18 PDT 2012


Not sure what the reporting labmember observed.  I ran a 1min nitride test of electrodes 1 & 2 and found that electrode 1 was more uniform.  Difference between min and max for #1 =51A, for #2 = 64A.  Average ER's within about 6%, acceptable for this old dear of an etcher.....




More information about the drytek2-pcs mailing list