Comment drytek2 SNF 2012-02-15 09:15:42: Completed monthly PM
latta at snf.stanford.edu
latta at snf.stanford.edu
Thu Apr 12 14:14:13 PDT 2012
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Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly
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Problem drytek2 SNF 2012-04-25 16:46:17: cannot turn on SF6
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Problem drytek2 SNF 2012-04-11 23:26:56: top 1st slot not etching uniformly
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Problem drytek2 SNF 2012-04-25 16:46:17: cannot turn on SF6
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