From eenriquez at snf.stanford.edu Wed Feb 15 09:12:17 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:12:17 -0800 Subject: Shutdown drytek2 SNF 2011-12-14 10:56:11: Scheduled shutdown Message-ID: Renovation work has been completed. From eenriquez at snf.stanford.edu Wed Feb 15 09:12:36 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:12:36 -0800 Subject: Problem drytek2 SNF 2011-12-11 00:14:07: O2 deviation Message-ID: no problem found From eenriquez at snf.stanford.edu Wed Feb 15 09:12:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:12:50 -0800 Subject: Comment drytek2 SNF 2011-12-10 11:01:34: not pumped down Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 09:15:20 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:15:20 -0800 Subject: Shutdown drytek2 SNF 2012-02-15 09:15:20: Needs electrode balancing. Message-ID: Jim Mcvittie will rebalance the electrode power. Also need to perform a process qual with the new quartz rings. From eenriquez at snf.stanford.edu Wed Feb 15 09:15:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:15:43 -0800 Subject: Comment drytek2 SNF 2012-02-15 09:15:42: Completed monthly PM Message-ID: From eenriquez at snf.stanford.edu Fri Feb 17 07:05:25 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Feb 2012 07:05:25 -0800 Subject: Comment drytek2 SNF 2011-11-25 11:58:10: Update missing pins. Message-ID: Archived From lindaw at snf.stanford.edu Tue Feb 21 14:39:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 21 Feb 2012 14:39:08 -0800 Subject: Comment drytek2 SNF 2012-02-21 14:39:08: what is the status of the electode balancing? Message-ID: Is there any news on the status of the drytek2 or progress with the electode balancing? Thanks. From eenriquez at snf.stanford.edu Tue Feb 21 15:52:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:52:12 -0800 Subject: Comment drytek2 SNF 2012-02-21 15:52:12: Update electrode balancing Message-ID: Jim McVittie is performing the balancing and wants to do some optical measurements. From latta at snf.stanford.edu Fri Feb 24 15:45:46 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 15:45:46 -0800 Subject: Problem drytek2 SNF 2011-12-08 04:40:21: multiple issues Message-ID: archived From latta at snf.stanford.edu Fri Feb 24 15:46:25 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 15:46:25 -0800 Subject: Comment drytek2 SNF 2012-02-21 14:39:08: what is the status of the electode balancing? Message-ID: will inform users of the quick qual performed today From latta at snf.stanford.edu Fri Feb 24 15:47:31 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 15:47:31 -0800 Subject: Comment drytek2 SNF 2012-02-21 15:52:12: Update electrode balancing Message-ID: Optical balancing system built, refined and electrodes balanced for center of the wafer. Quick qual run and results will be posted shortly. From latta at snf.stanford.edu Fri Feb 24 15:56:59 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 15:56:59 -0800 Subject: Comment drytek2 SNF 2012-02-24 15:56:58: On using the new quartz rings Message-ID: Folks, You will notice that quartz rings have been placed on each electrode. This is to get rid of those annoying teflon pins. The quartz rings 'corral' your wafer so that it stays within the sweet spot of the electrode. The rings, however, have made loading and unloading of wafers a bit more challenging; Loading- make sure that your sample is not hung up on the ring. It should 'float' within the ring. If it is caught on the ring the cooling is very poor and the etch will be very nonuniform. Unloading- grabbing the wafer with tweezers is difficult, so simply (and with clean gloves) pull the ring towards you until the wafer is a little bit off the electrode. This way you can grab your wafer. Push the ring back into the centered position. CAUTION- be very careful not to drop the ring off of the electrode. This will most likely break it. We welcome your comments. Team Etch From latta at snf.stanford.edu Fri Feb 24 17:21:32 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 17:21:32 -0800 Subject: Shutdown drytek2 SNF 2012-02-15 09:15:20: Needs electrode balancing. Message-ID: Electrodes balanced. Quick quals posted From latta at snf.stanford.edu Fri Feb 24 17:25:15 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 17:25:15 -0800 Subject: Comment drytek2 SNF 2012-02-24 17:25:14: Etch rate after electrode balancing Message-ID: Poly etch, program 2 mins, averages given. Electrode 1 1292A/min 2 1218A 3 1275A 4 1219A 5 1258A 6 1237A Etch rate results by position on the wafer have been posted on the wiki. https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications From latta at snf.stanford.edu Fri Feb 24 17:26:34 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 24 Feb 2012 17:26:34 -0800 Subject: Comment drytek2 SNF 2012-02-24 17:26:33: Additional quals forthcoming Message-ID: I'll post more complete quals (more materials, more etch programs) next week