Comment drytek2 SNF 2012-02-24 15:56:58: On using the new quartz rings

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Feb 24 15:56:59 PST 2012


Folks,
You will notice that quartz rings have been placed on each electrode.  This is to get rid of those annoying teflon pins.  The quartz rings 'corral' your wafer so that it stays within the sweet spot of the electrode.
The rings, however, have made loading and unloading of wafers a bit more challenging;
Loading- make sure that your sample is not hung up on the ring.  It should 'float' within the ring.  If it is caught on the ring the cooling is very poor and the etch will be very nonuniform.
Unloading- grabbing the wafer with tweezers is difficult, so simply (and with clean gloves) pull the ring towards you until the wafer is a little bit off the electrode.  This way you can grab your wafer.  Push the ring back into the centered position.  CAUTION- be very careful not to drop the ring off of the electrode.  This will most likely break it.
We welcome your comments.
Team Etch




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