Comment drytek2 SNF 2012-02-24 17:25:14: Etch rate after electrode balancing

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Feb 24 17:25:15 PST 2012


Poly etch, program 2 mins, averages given.
Electrode 1  1292A/min
2  1218A
3  1275A
4  1219A
5  1258A
6  1237A
Etch rate results by position on the wafer have been posted on the wiki.
https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications




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