From latta at snf.stanford.edu Tue Jul 17 11:01:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:01:35 -0700 Subject: Comment drytek2 SNF 2012-06-15 17:39:44: Idle purge Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:01:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:01:51 -0700 Subject: Comment drytek2 SNF 2012-06-14 15:40:17: drytek2 needs more log sheets Message-ID: done From latta at snf.stanford.edu Tue Jul 17 11:02:23 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:02:23 -0700 Subject: Comment drytek2 SNF 2012-05-14 11:07:09: Plasma quits during etch Message-ID: assumed this was fixed From latta at snf.stanford.edu Tue Jul 17 11:02:38 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:02:38 -0700 Subject: Comment drytek2 SNF 2012-05-02 15:13:39: O2 descum seems to be working now Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:02:50 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:02:50 -0700 Subject: Comment drytek2 SNF 2012-03-28 08:43:36: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:03:07 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:03:07 -0700 Subject: Comment drytek2 SNF 2012-02-24 17:26:33: Additional quals forthcoming Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:03:22 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:03:22 -0700 Subject: Comment drytek2 SNF 2012-02-24 17:25:14: Etch rate after electrode balancing Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:03:38 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:03:38 -0700 Subject: Comment drytek2 SNF 2012-02-24 15:56:58: On using the new quartz rings Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:03:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:03:51 -0700 Subject: Comment drytek2 SNF 2011-11-02 08:15:40: New operating procedure Message-ID: archived From latta at snf.stanford.edu Tue Jul 17 11:04:13 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:04:13 -0700 Subject: Comment drytek2 SNF 2011-09-28 15:19:43: Contaminated wafers allowed in electrodes 5&6 Message-ID: archived From chienyuc at snf.stanford.edu Tue Jul 17 20:56:49 2012 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 17 Jul 2012 20:56:49 -0700 Subject: Comment drytek2 SNF 2012-07-17 20:56:49: Sparks in O2 plasma Message-ID: Ran process 1 O2 plasma and noticed there are lots of sparking dots on all of the plates and the teflon rings. After few runs of O2 plasma it's fewer but chamber may be contaminated already. From ytcheng at snf.stanford.edu Fri Jul 27 07:53:51 2012 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Fri, 27 Jul 2012 07:53:51 -0700 Subject: Comment drytek2 SNF 2012-07-27 07:53:50: "Standby button" light bulb is out Message-ID: "Standby button" light bulb is out, but the function is fine. From zzp at snf.stanford.edu Sat Jul 28 23:53:44 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sat, 28 Jul 2012 23:53:44 -0700 Subject: Problem drytek2 SNF 2012-07-28 23:53:43: standby button no light Message-ID: From cbaxter at snf.stanford.edu Sun Jul 29 20:05:11 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Jul 2012 20:05:11 -0700 Subject: Problem drytek2 SNF 2012-07-28 23:53:43: standby button no light Message-ID: Changed bulb..