Comment drytek2 SNF 2012-07-17 20:56:49: Sparks in O2 plasma

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Tue Jul 17 20:56:49 PDT 2012


Ran process 1 O2 plasma and noticed there are lots of sparking dots  on all of the plates and the teflon rings.  After few runs of O2 plasma it's fewer but chamber may be contaminated already.




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