Problem drytek2 SNF 2012-06-03 22:46:10: no sf6?

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Sun Jun 3 22:46:10 PDT 2012


I tried to run process 2 with SF6, but the flow shows -001 (normally, it shows +000).  I also didn't see a purple glow, and the timer starts counting before the pressure is reached (33 mT instead of 150 mT).  I'm guessing it has to do with the lack of SF6.




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