From eenriquez at snf.stanford.edu Mon Mar 5 09:17:21 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2012 09:17:21 -0800 Subject: Shutdown drytek2 SNF 2012-03-05 09:17:21: Cooling water Message-ID: From eenriquez at snf.stanford.edu Mon Mar 5 12:37:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2012 12:37:34 -0800 Subject: Shutdown drytek2 SNF 2012-03-05 09:17:21: Cooling water Message-ID: PCW is OK From fanpy at snf.stanford.edu Wed Mar 7 15:40:07 2012 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Wed, 7 Mar 2012 15:40:07 -0800 Subject: Problem drytek2 SNF 2012-03-07 15:40:06: gas flow control Message-ID: Gary and I tested together, and it seems like the gas flow control knobs for SF6, F22 and CF4 all don't work properly for at least both process 2 and 3. There is no gas flowing when adjusting the knob, and the gas flow will max out when flip the gas control switch to "Auto" indicates gas is flow on indeed. O2 control works fine. From eenriquez at snf.stanford.edu Thu Mar 8 08:01:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Mar 2012 08:01:59 -0800 Subject: Problem drytek2 SNF 2012-03-07 15:40:06: gas flow control Message-ID: Found gas controllers were OFF. Please leave all the gas controller switches in the Auto position. There is no need to switch them OFF. The system will automatically disable controllers which have not been selected. From fpurkl at snf.stanford.edu Tue Mar 13 16:20:44 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Tue, 13 Mar 2012 16:20:44 -0700 Subject: Problem drytek2 SNF 2012-03-13 16:20:44: No plasma for O2 descum (P#1) Message-ID: I could not ignite a plasma running the O2 descum receipe with standard pressure/gas flow. I tried tuning for 20 min using the cap and coil settings of previous users with no luck. From cbaxter at snf.stanford.edu Tue Mar 13 18:01:20 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Mar 2012 18:01:20 -0700 Subject: Problem drytek2 SNF 2012-03-13 16:20:44: No plasma for O2 descum (P#1) Message-ID: Was able to tuned with o2 w/out problem. From mzhang2 at snf.stanford.edu Wed Mar 14 11:37:08 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Wed, 14 Mar 2012 11:37:08 -0700 Subject: Problem drytek2 SNF 2012-03-14 11:37:08: fail to run O2 etching Message-ID: even if the cap and coil numbers are turned properly during dummy run, when loading the wafer and using the same parameters, reverse power goes immediately above the scale after the plasma is on From latta at snf.stanford.edu Wed Mar 14 14:07:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Mar 2012 14:07:35 -0700 Subject: Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent Message-ID: Twice today reports of having porblems tuning the RF (both O2 and O2/CF4 recipes) during set up run have been reported. But more puzzling is that when wafers are comitted to the etcher the RF is not tuned. In fact, it maxes out at about 90W with very high reflected and no plasma. I think the tuning issues seen during the set up runs are due to users trying to tune without a plasma is struck. But that doesn't explain the problems for the 'real' run, i.e., with a load. From latta at snf.stanford.edu Wed Mar 14 14:08:06 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Mar 2012 14:08:06 -0700 Subject: Problem drytek2 SNF 2012-03-14 11:37:08: fail to run O2 etching Message-ID: newer problem posted From ntayebi at snf.stanford.edu Wed Mar 14 17:03:18 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Wed, 14 Mar 2012 17:03:18 -0700 Subject: Shutdown drytek2 SNF 2012-03-14 17:03:17: reflected power is not going down Message-ID: Very likely problem with coil. Jim McVittee has been looking at it. From cbaxter at snf.stanford.edu Wed Mar 14 18:40:55 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Mar 2012 18:40:55 -0700 Subject: Shutdown drytek2 SNF 2012-03-14 17:03:17: reflected power is not going down Message-ID: Was able to tuned at 500watts with >15watts reflective. When tuning start with low power first and slowly adjust to desire power setpoint. From dgunning at snf.stanford.edu Thu Mar 15 02:57:58 2012 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 15 Mar 2012 02:57:58 -0700 Subject: Problem drytek2 SNF 2012-03-15 02:57:58: trouble tuning Message-ID: i also had trouble tuning - just as nancy describes in previous post. i tried using sf6/o2 on process 2 and 3. From eenriquez at snf.stanford.edu Thu Mar 15 10:12:16 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 10:12:16 -0700 Subject: Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent Message-ID: Changed electrode cooling water (chiller). Unable to make the RF tuning fail. After inial tuning, I ran the system with wafer, no wafer, multiple wafers with l< 5 watts reflected power without having to retune. From eenriquez at snf.stanford.edu Thu Mar 15 10:12:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 10:12:27 -0700 Subject: Problem drytek2 SNF 2012-03-15 02:57:58: trouble tuning Message-ID: Changed electrode cooling water (chiller). Unable to make the RF tuning fail. After inial tuning, I ran the system with wafer, no wafer, multiple wafers with l< 5 watts reflected power without having to retune. From dongrip at snf.stanford.edu Thu Mar 15 17:47:48 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 15 Mar 2012 17:47:48 -0700 Subject: Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch Message-ID: unstable plasma power during the etch. From xzhuan1 at snf.stanford.edu Thu Mar 15 18:55:53 2012 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 15 Mar 2012 18:55:53 -0700 Subject: Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3 Message-ID: No matter how hard I try I cannot tune the fwd power to be more than 220 W for process 3 nitride etch From dgunning at snf.stanford.edu Fri Mar 16 03:20:29 2012 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Fri, 16 Mar 2012 03:20:29 -0700 Subject: Problem drytek2 SNF 2012-03-16 03:20:29: couldn't tune Message-ID: sf6/o2, process 3 - best i got was fwd250W:ref50W From eenriquez at snf.stanford.edu Fri Mar 16 10:16:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Mar 2012 10:16:43 -0700 Subject: Shutdown drytek2 SNF 2012-03-16 10:16:43: RF tuning problem Message-ID: From eenriquez at snf.stanford.edu Fri Mar 16 13:25:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Mar 2012 13:25:03 -0700 Subject: Shutdown drytek2 SNF 2012-03-16 10:16:43: RF tuning problem Message-ID: Repositioned electrode insulators inside the chamber. Cap and coil positions are closer to their normal positions. Neither one should be near the end of their travel. The Capacitor should be around the 50% mark. We will continue to monitor this problem. From cbaxter at snf.stanford.edu Tue Mar 20 16:24:01 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Mar 2012 16:24:01 -0700 Subject: Comment drytek2 SNF 2012-03-20 16:24:00: SF6/O2 recipe Message-ID: I had no problem stircking plasma with SF6/O2, I start with low power and slowly adjust to a desire power needed. From eenriquez at snf.stanford.edu Wed Mar 21 07:36:36 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:36:36 -0700 Subject: Comment drytek2 SNF 2012-03-20 16:24:00: SF6/O2 recipe Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 21 07:37:15 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:37:15 -0700 Subject: Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch Message-ID: Problem has not reoccured. From eenriquez at snf.stanford.edu Wed Mar 21 07:40:18 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:40:18 -0700 Subject: Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3 Message-ID: Tested RF tuning for several days. Had no problem tuning since we repositioned electrode wire's ceramic sleeves. From eenriquez at snf.stanford.edu Wed Mar 21 07:40:24 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:40:24 -0700 Subject: Problem drytek2 SNF 2012-03-16 03:20:29: couldn't tune Message-ID: Tested RF tuning for several days. Had no problem tuning since we repositioned electrode wire's ceramic sleeves. From mzhang2 at snf.stanford.edu Wed Mar 21 10:06:47 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Wed, 21 Mar 2012 10:06:47 -0700 Subject: Shutdown drytek2 SNF 2012-03-21 10:06:46: power off Message-ID: There is suddenly an electric power off during etching. Before that, everything is normal. From eenriquez at snf.stanford.edu Wed Mar 21 10:17:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 10:17:41 -0700 Subject: Shutdown drytek2 SNF 2012-03-21 10:06:46: power off Message-ID: Turned power back on. Ran O2 plasma. From eenriquez at snf.stanford.edu Wed Mar 28 08:43:37 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2012 08:43:37 -0700 Subject: Comment drytek2 SNF 2012-03-28 08:43:36: Completed monthly PM Message-ID: