Problem drytek2 SNF 2012-03-07 15:40:06: gas flow control

fanpy at snf.stanford.edu fanpy at snf.stanford.edu
Wed Mar 7 15:40:07 PST 2012


Gary and I tested together, and it seems like the gas flow control knobs for SF6, F22 and CF4 all don't work properly for at least both process 2 and 3. There is no gas flowing when adjusting the knob, and the gas flow will max out when flip the gas control switch to "Auto" indicates gas is flow on indeed. O2 control works fine. 




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