Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Mar 14 14:07:35 PDT 2012


Twice today reports of having porblems tuning the RF (both O2 and O2/CF4 recipes) during set up run have been reported.  But more puzzling is that when wafers are comitted to the etcher the RF is not tuned.  In fact, it maxes out at about 90W with very high reflected and no plasma.
I think the tuning issues seen during the set up runs are due to users trying to tune without a plasma is struck.  But that doesn't explain the problems for the 'real' run, i.e., with a load.




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