Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 15 10:12:16 PDT 2012


Changed electrode cooling water (chiller).  Unable to make the RF tuning fail.  After inial tuning, I ran the system with wafer, no wafer, multiple wafers with l< 5 watts reflected power without having to retune.




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