Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Thu Mar 15 18:55:53 PDT 2012


No matter how hard I try I cannot tune the fwd power to be more than 220 W for process 3 nitride etch




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