Comment drytek2 SNF 2012-03-20 16:24:00: SF6/O2 recipe

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Mar 20 16:24:01 PDT 2012


I had no problem stircking plasma with SF6/O2, I start with
low power and slowly adjust to a desire power needed.




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