Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Mar 21 07:37:15 PDT 2012
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Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch
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Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3
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Problem has not reoccured.
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Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch
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Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3
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