March 2012 Archives by thread

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Starting: Mon Mar 5 09:17:21 PST 2012
Ending: Wed Mar 28 08:43:37 PDT 2012
Messages: 27

• Shutdown drytek2 SNF 2012-03-05 09:17:21: Cooling water   eenriquez at snf.stanford.edu
  • Shutdown drytek2 SNF 2012-03-05 09:17:21: Cooling water   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2012-03-07 15:40:06: gas flow control   fanpy at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-07 15:40:06: gas flow control   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2012-03-13 16:20:44: No plasma for O2 descum (P#1)   fpurkl at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-13 16:20:44: No plasma for O2 descum (P#1)   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2012-03-14 11:37:08: fail to run O2 etching   mzhang2 at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-14 11:37:08: fail to run O2 etching   latta at snf.stanford.edu
• Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent   latta at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-14 14:07:33: RF power intermittent   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2012-03-14 17:03:17: reflected power is not going down   ntayebi at snf.stanford.edu
  • Shutdown drytek2 SNF 2012-03-14 17:03:17: reflected power is not going down   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2012-03-15 02:57:58: trouble tuning   dgunning at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-15 02:57:58: trouble tuning   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch   dongrip at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-15 17:47:48: plasma suddenly stops during the etch   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3   xzhuan1 at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-15 18:55:52: cannot tune process 3   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2012-03-16 03:20:29: couldn't tune   dgunning at snf.stanford.edu
  • Problem drytek2 SNF 2012-03-16 03:20:29: couldn't tune   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2012-03-16 10:16:43: RF tuning problem   eenriquez at snf.stanford.edu
  • Shutdown drytek2 SNF 2012-03-16 10:16:43: RF tuning problem   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2012-03-20 16:24:00: SF6/O2 recipe   cbaxter at snf.stanford.edu
  • Comment drytek2 SNF 2012-03-20 16:24:00: SF6/O2 recipe   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2012-03-21 10:06:46: power off   mzhang2 at snf.stanford.edu
  • Shutdown drytek2 SNF 2012-03-21 10:06:46: power off   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2012-03-28 08:43:36: Completed monthly PM   eenriquez at snf.stanford.edu

Last message date: Wed Mar 28 08:43:37 PDT 2012
Archived on: Fri Jan 11 13:05:17 PST 2013

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