Comment drytek2 SNF 2012-05-02 15:13:39: O2 descum seems to be working now

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Wed May 2 15:13:39 PDT 2012

Previous message: Problem drytek2 SNF 2012-05-02 14:25:43: RF power maxing out at ~90W
Next message: Comment drytek2 SNF 2012-05-14 11:07:09: Plasma quits during etch
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

O2 descum (receipe 1) seems to be working now. I got 500W forward with 2.5W reverse power.

Previous message: Problem drytek2 SNF 2012-05-02 14:25:43: RF power maxing out at ~90W
Next message: Comment drytek2 SNF 2012-05-14 11:07:09: Plasma quits during etch
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list