Comment drytek2 SNF 2012-05-14 11:07:09: Plasma quits during etch

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon May 14 11:07:10 PDT 2012


tuning for both O2 descum and Poly were a tad touchy.  got both tuned nicely, then the plasma would just drop out for no apparent reason during etch.  Maybe there is a loose RF wire/connection again???? It didn't happen every time the etch was run so it was somewhat sporadic.
 Also, when the O2 descum was running well, the reflected power would sometimes drift quite a lot over the course of a 2 min etch.  This was also somewhat sporadic. 




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