From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 13, 2000 Subject: Shutdown drytek2: Len Message-ID: Electrode cooling water flow stopped. From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem drytek2: Len 2 Message-ID: testing problem report electrode cooling stopped From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear drytek2: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 13, 2000 Subject: Shutdown Clear drytek2: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 17, 2000 Subject: Shutdown drytek2: working on chiller¨ Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 17, 2000 Subject: Shutdown Clear drytek2: Message-ID: From franklin at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: May 1, 2000 Subject: Problem drytek2: rf power too low, Message-ID: Unable to get RF power to the 500W needed. Tried process 1, 2, and 3. Reflected power was near 0, but forward power never aproached the level needed for an etch. Guessing that there is something wrong w/ the RF power being supplied. I don't recomend using it, unless you think you know the solution to this problem. Even tried increasing rf power to the max allowed nate franklin From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 2, 2000 Subject: Shutdown drytek2: low rf output Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 8, 2000 Subject: Problem Clear drytek2: part is installed and tested Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 8, 2000 Subject: Shutdown Clear drytek2: part installed and tested Message-ID: From usriniva at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: usriniva at snf.stanford.edu (usriniva at snf.stanford.edu) Date: May 15, 2000 Subject: Problem drytek2: No oxygen flow Message-ID: In process 1, there is no oxygen flow. uma From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown drytek2: no o2 flow... Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown Clear drytek2: mks controller was,it was bad contact on connector. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 16, 2000 Subject: Problem Clear drytek2: reseated connector on display Message-ID: From grupp at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: May 20, 2000 Subject: Problem drytek2: Message-ID: no reading on flowmeter #4 during O2 descum (process #1), tho plasma looks ok (white) and can observe pressure regulator adjusting when change flow knob, so O2 is flowing. From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 22, 2000 Subject: Problem Clear drytek2: cleared problem - replaced 3-4 flow readout. Message-ID: From sminne at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: May 23, 2000 Subject: Problem drytek2: top electrode, back right, plastic pin is gone Message-ID: From sylviajs at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: sylviajs at snf.stanford.edu (sylviajs at snf.stanford.edu) Date: May 23, 2000 Subject: Problem drytek2: no rf power Message-ID: in middle of nitride run, power cut off (from about 500 to about 100 on the analog meter). tried to run again --- still, even with reflected power tuned down, power is too low to even register on the digital scale. also, red light on O2 dial (deviation light) is on. but users before me were running same process with no problem, with this light on. From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 24, 2000 Subject: Shutdown drytek2: 500pa generator has a blown 7amp fuse. looking for a replacement... Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 24, 2000 Subject: Shutdown Clear drytek2: changed shorted bridge rectifier and 7amp fuse Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 24, 2000 Subject: Problem Clear drytek2: change shorted rectifier Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 24, 2000 Subject: Problem Clear drytek2: installed missing teflon guide.. Message-ID: From michaud at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: michaud at snf.stanford.edu (michaud at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem drytek2: flowmeter Message-ID: flow is slightly above orange line on Drytek-2. Water is flowing - is this so bad that I can't use it? Kaleb... From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 13, 2000 Subject: Problem Clear drytek2: Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 21, 2000 Subject: Problem drytek2: standby bulb is burned out Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 21, 2000 Subject: Problem Clear drytek2: replaced bulb. Message-ID: From chcheng at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Aug 2, 2000 Subject: Problem drytek2: Fixing pin missing on tray 3 Message-ID: One of the four fixing pins missing on tray 3 From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 2, 2000 Subject: Problem Clear drytek2: installed teflon tip.. Message-ID: From utkan at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: utkan at snf.stanford.edu (utkan at snf.stanford.edu) Date: Aug 13, 2000 Subject: Problem drytek2: cooling system not operating Message-ID: The flowmeter is measuring NO flow, and I found process 3 on when I came. From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 14, 2000 Subject: Shutdown drytek2: no electrode cooling. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 14, 2000 Subject: Shutdown Clear drytek2: changed fuse holder and fuse Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 14, 2000 Subject: Problem Clear drytek2: change fuse Message-ID: From sminne at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Aug 16, 2000 Subject: Problem drytek2: Gives error E10 when trying to start process. Could not get standby to run! Steve Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2000 Subject: Shutdown drytek2: E-10 error Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2000 Subject: Shutdown Clear drytek2: door was not closed. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2000 Subject: Problem Clear drytek2: door not closed. Message-ID: From greene at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem drytek2: System light burned out Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear drytek2: changed light bulb Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear drytek2: changed light bulb Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear drytek2: Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 15, 2000 Subject: Problem drytek2: RF on button burnt out. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 21, 2000 Subject: Problem Clear drytek2: changed rf on indicator bulb Message-ID: From mcp at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mcp at snf.stanford.edu (mcp at snf.stanford.edu) Date: Oct 9, 2000 Subject: Problem drytek2: power Message-ID: Hi! I was doing at 11 minute nitride etch, and about 8 minutes in I noticed the power had dropped to 0 and reverse power was at 80. I has just finished 5 and 6 minute runs with no problem at 500 W, 0-20 reverse. I stopped the run and tried to retune, but couldn't get the power over 350 W. Everything was fine for the previous two users, and for my first two runs...it just quit in the middle of the third run. Thanks! Mark Peterman From sminne at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Oct 11, 2000 Subject: Shutdown drytek2: Electrode cooling water at zero flow Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 11, 2000 Subject: Shutdown Clear drytek2: removed scale from electrodes. Message-ID: From pzwahlen at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2: O2 MFC errorDate: Nov 17, 2000 7:28:52 PM Message-ID: In the standby mode the O2 LED indicator for the deviation is red. It might be due to a leak in the oxygen line. I just ran a process using O2 (DESCUM program). During that run the LED was green. I' m wondering if for another plasma where no oxygen is needed if there would not be some oxygen added due to this possible leak. From nxs4059 at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-08-17 13:59:27: Please put in proper standby Message-ID: <24230438.134.1345237167550.JavaMail.coral@shine> When I started my process the chamber wasn't pumped down, RF power supply had been left on, with positive powers on all 3 process dials, and gasses left on... From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-17 16:24:41: no process cooling water Message-ID: <20992246.164.1345245881786.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-17 16:24:41: no process cooling water Message-ID: <11264549.188.1345250570239.JavaMail.coral@shine> System back to normal operation.. From pcristman at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-27 23:08:25: no mechanical pump or blower light on Message-ID: <26078442.30.1346134105903.JavaMail.coral@shine> The white lights for the mechanical pump and blower are no longer illuminated. Ran a 6 minute descum to check settings and process looked fine. Changed time to 1 minute and went to re-run. System did not start correctly. Then noticed mechanical pump and blower lights had gone off. All gases are turned off in the back. Door is closed and standby light is light. Tried to clear wafer and put the system into and out of standby but no change. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-27 23:08:25: no mechanical pump or blower light on Message-ID: <33404359.36.1346169672644.JavaMail.coral@shine> Restarted the mechanical pump. Installed demister. From chen0622 at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-08-28 10:25:25: could not pump down Message-ID: <22866863.40.1346174725657.JavaMail.coral@shine> the sequence did not start after push "cycle start". From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-28 11:09:44: Need to replace vacuum pump Message-ID: <30547158.43.1346177384486.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-08-28 11:09:44: Need to replace vacuum pump Message-ID: <30242345.64.1346253585601.JavaMail.coral@shine> Replaced the vacuum pump. Ran O2 plasma. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-08-28 10:25:25: could not pump down Message-ID: <5752965.65.1346253590609.JavaMail.coral@shine> Replaced the vacuum pump. Ran O2 plasma. From pcristman at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-08-29 10:06:52: System light is not on Message-ID: <30492014.68.1346260012678.JavaMail.coral@shine> Other lights on and system seems otherwise fine. did not take the system out of standby after last user. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-08-29 10:06:52: System light is not on Message-ID: <6821560.111.1346339463617.JavaMail.coral@shine> Replaced burnt out light bulb From biyang at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: biyang at snf.stanford.edu (biyang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-09-11 23:52:36: timer 2 can't go above 2.xx min Message-ID: <16535834.94.1347432757030.JavaMail.coral@shine> somehow the timer2 stops at 2.xx min. when setting timer at 10 min, it stops at 2min. but 2min 59 sec works fine., From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-09-11 23:52:36: timer 2 can't go above 2.xx min Message-ID: <32057915.106.1347468516827.JavaMail.coral@shine> Cleaned the timer switch contacts. Ran an O2 clean for 34 min 30 sec with no problem. From ouyang at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: ouyang at snf.stanford.edu (ouyang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-09-16 22:13:47: Dropped wafer in chamber Message-ID: <22919851.3.1347858828057.JavaMail.coral@shine> quarter wafer fell off the stage... couldn't see it anywhere.... equipment is operating normal though;. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-09-16 22:13:47: Dropped wafer in chamber Message-ID: <5488981.13.1347894976695.JavaMail.coral@shine> Recovered a wafer piece From pcristman at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-09-25 10:19:09: Please put in proper standby 2 Message-ID: <7207356.10.1348593550078.JavaMail.coral@shine> tool was vented (camber open) with the process 1 light on RF power still on at 10 am this morning. Fortunately all the gases were off in the back. From qran at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-10-22 19:49:03: can't tune forward/reverse power Message-ID: <27480577.28.1350960543883.JavaMail.coral@shine> I was using recipe 3 for SiN etch. Pressure, gas flow are all OK. In the set-up etch, after the tuning, RF power was correct (500W), the reverse power was less than 5W. Right after the setup, started the real process, the forward power reduced to ~100W, and the reverse power was around to around 70W. I tried the setup/process back-and-forth for a few times. Got the same problem everytime: RF power is correct in the setup run, but reduces a lot next run. The tuning is set to Manual. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-10-22 19:49:03: can't tune forward/reverse power Message-ID: <19787740.35.1351005334815.JavaMail.coral@shine> Ran recipe 3 for 20 minutes with no problems. The reflected power was stable at < 5 W. From suyog at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-10-23 22:56:29: Pressing standby doesn't vent the chamber Message-ID: <17446527.59.1351058190099.JavaMail.coral@shine> From suyog at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-10-23 23:00:35: Pressure in standby not ~ 200mT Message-ID: <28789462.60.1351058436163.JavaMail.coral@shine> From mdickey at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-10-23 23:00:35: Pressure in standby not ~ 200mT Message-ID: <8189029.62.1351084344390.JavaMail.coral@shine> Blower was off. Back on and reading 231 m.t. in standby From mdickey at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-10-23 22:56:29: Pressing standby doesn't vent the chamber Message-ID: <12418337.66.1351090312898.JavaMail.coral@shine> Related to the blower being off From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-07-17 20:56:49: Sparks in O2 plasma Message-ID: <30688796.136.1351281076951.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-07-27 07:53:50: "Standby button" light bulb is out Message-ID: <27523593.137.1351281099959.JavaMail.coral@shine> Replaced standby button light. From eenriquez at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-08-17 13:59:27: Please put in proper standby Message-ID: <9803109.138.1351281107968.JavaMail.coral@shine> Archived From jasonlin at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-11-12 22:35:56: System not on Message-ID: <16664142.4.1352788556934.JavaMail.coral@shine> From mdickey at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Shutdown drytek2 SNF 2012-11-12 22:35:56: System not on Message-ID: <20513744.6.1352818159256.JavaMail.coral@shine> Rebooted system. User to test From mdickey at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 08:30:14: CF4 Message-ID: <14126576.0.1352824215218.JavaMail.coral@shine> Temporarily out of CF4. Replacement is being ordered From mdickey at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-11-13 09:59:50: Freon 14 Message-ID: <9167305.5.1352829590188.JavaMail.coral@shine> CF4 expected tp be here by thursday at the latest From lindaw at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 13:44:46: coral interlock light not on when enabled Message-ID: <19585733.19.1352843086870.JavaMail.coral@shine> From xzhuan1 at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 16:47:41: no SF6 flow when running prog 2 Message-ID: <6392517.24.1352854061503.JavaMail.coral@shine> From xzhuan1 at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Comment drytek2 SNF 2012-11-13 17:03:30: SF6 gas was OK. Message-ID: <3748502.31.1352855011812.JavaMail.coral@shine> The dip swtich was turned off. It's now on and SF6 gas is good. From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 13:44:46: coral interlock light not on when enabled Message-ID: <7134064.35.1352860941678.JavaMail.coral@shine> Tool is hooked up on Badger interlock now. From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 16:47:41: no SF6 flow when running prog 2 Message-ID: <1028644.36.1352861009810.JavaMail.coral@shine> Found Sf6 gas controller toggle switch was turned off. From cbaxter at snf.stanford.edu Fri Jan 11 13:04:43 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:04:43 -0000 Subject: Problem drytek2 SNF 2012-11-13 08:30:14: CF4 Message-ID: <25339545.92.1353035814734.JavaMail.coral@shine> CF4 is back online..