Problem drytek2: rf power too low,

franklin at snf.stanford.edu franklin at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013


Unable to get RF power to the 500W needed.  Tried process 1, 2, and 3.  Reflected power was near 0, but forward power never aproached the level needed for an etch.  Guessing that there is something wrong w/ the RF power being supplied.  I don't recomend using it, unless you think you know the solution to this problem.  Even tried increasing rf power to the max allowed
nate franklin




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