Problem drytek2: O2 MFC errorDate: Nov 17, 2000 7:28:52 PM

pzwahlen at snf.stanford.edu pzwahlen at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013

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In the standby mode the O2 LED indicator for the deviation is red. It might be due to a leak in the oxygen line. I just ran a process using O2 (DESCUM program). During that run the LED was green. I' m wondering if for another plasma where no oxygen is needed if there would not be some oxygen added due to this possible leak.

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