Comment drytek2 SNF 2012-08-17 13:59:27: Please put in proper standby

nxs4059 at snf.stanford.edu nxs4059 at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013


When I started my process the chamber  wasn't pumped down, RF power supply had been left on, with positive powers on all 3 process dials, and gasses left on...



More information about the drytek2-pcs mailing list