Shutdown drytek2 SNF 2012-08-27 23:08:25: no mechanical pump or blower light on

pcristman at snf.stanford.edu pcristman at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013


The white lights for the mechanical pump and blower are no longer illuminated.  Ran a 6 minute descum to check settings and process looked fine.  Changed time to 1 minute and went to re-run.  System did not start correctly.  Then noticed mechanical pump and blower lights had gone off.  All gases are turned off in the back.  Door is closed and standby light is light.  Tried to clear wafer and put the system into and out of standby but no change.



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