Comment drytek2 SNF 2012-09-25 10:19:09: Please put in proper standby 2

pcristman at snf.stanford.edu pcristman at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013


tool was vented (camber open) with the process 1 light on RF power still on at 10 am this morning. Fortunately all the gases were off in the back.



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