Problem drytek2 SNF 2012-10-22 19:49:03: can't tune forward/reverse power

qran at snf.stanford.edu qran at snf.stanford.edu
Fri Jan 11 13:04:43 PST 2013


I was using recipe 3 for SiN etch. Pressure, gas flow are all OK. In the set-up etch, after the tuning, RF power was correct (500W), the reverse power was less than 5W. Right after the setup, started the real process, the forward power reduced to ~100W, and the reverse power was around to around 70W. 
I tried the setup/process back-and-forth for a few times. Got the same problem everytime: RF power is correct in the setup run, but reduces a lot next run. The tuning is set to Manual. 



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