January 2013 Archives by author

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Starting: Fri Jan 11 13:04:43 PST 2013
Ending: Fri Jan 11 13:04:43 PST 2013
Messages: 81

Problem drytek2: standby bulb is burned out beckwith at snf.stanford.edu
Problem drytek2 SNF 2012-09-11 23:52:36: timer 2 can't go above 2.xx min biyang at snf.stanford.edu
Shutdown drytek2: Len booth at snf.stanford.edu
Problem drytek2: Len 2 booth at snf.stanford.edu
Problem Clear drytek2: cleared problem - replaced 3-4 flow readout. booth at snf.stanford.edu
Problem Clear drytek2: booth at snf.stanford.edu
Problem Clear drytek2: booth at snf.stanford.edu
Problem Clear drytek2: replaced bulb. booth at snf.stanford.edu
Shutdown drytek2: no electrode cooling. booth at snf.stanford.edu
Shutdown Clear drytek2: booth at snf.stanford.edu
Shutdown drytek2: E-10 error booth at snf.stanford.edu
Shutdown Clear drytek2: door was not closed. booth at snf.stanford.edu
Problem Clear drytek2: door not closed. booth at snf.stanford.edu
Shutdown Clear drytek2: removed scale from electrodes. booth at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 16:47:41: no SF6 flow when running prog 2 cbaxter at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-17 16:24:41: no process cooling water cbaxter at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 08:30:14: CF4 cbaxter at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 13:44:46: coral interlock light not on when enabled cbaxter at snf.stanford.edu
Shutdown drytek2: no o2 flow... cbaxter at snf.stanford.edu
Shutdown Clear drytek2: mks controller was,it was bad contact on connector. cbaxter at snf.stanford.edu
Problem Clear drytek2: reseated connector on display cbaxter at snf.stanford.edu
Shutdown drytek2: 500pa generator has a blown 7amp fuse. looking for a replacement... cbaxter at snf.stanford.edu
Shutdown Clear drytek2: changed shorted bridge rectifier and 7amp fuse cbaxter at snf.stanford.edu
Problem Clear drytek2: change shorted rectifier cbaxter at snf.stanford.edu
Problem Clear drytek2: installed missing teflon guide.. cbaxter at snf.stanford.edu
Problem Clear drytek2: installed teflon tip.. cbaxter at snf.stanford.edu
Shutdown Clear drytek2: changed fuse holder and fuse cbaxter at snf.stanford.edu
Problem Clear drytek2: change fuse cbaxter at snf.stanford.edu
Problem Clear drytek2: changed light bulb cbaxter at snf.stanford.edu
Problem Clear drytek2: changed light bulb cbaxter at snf.stanford.edu
Problem Clear drytek2: cbaxter at snf.stanford.edu
Shutdown drytek2: working on chiller cbaxter at snf.stanford.edu
Problem Clear drytek2: changed rf on indicator bulb cbaxter at snf.stanford.edu
Shutdown Clear drytek2: cbaxter at snf.stanford.edu
Shutdown drytek2: low rf output cbaxter at snf.stanford.edu
Problem Clear drytek2: part is installed and tested cbaxter at snf.stanford.edu
Shutdown Clear drytek2: part installed and tested cbaxter at snf.stanford.edu
Problem drytek2: Fixing pin missing on tray 3 chcheng at snf.stanford.edu
Problem drytek2 SNF 2012-08-28 10:25:25: could not pump down chen0622 at snf.stanford.edu
Problem drytek2 SNF 2012-10-22 19:49:03: can't tune forward/reverse power eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-17 16:24:41: no process cooling water eenriquez at snf.stanford.edu
Comment drytek2 SNF 2012-07-27 07:53:50: "Standby button" light bulb is out eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-28 11:09:44: Need to replace vacuum pump eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-28 11:09:44: Need to replace vacuum pump eenriquez at snf.stanford.edu
Comment drytek2 SNF 2012-07-17 20:56:49: Sparks in O2 plasma eenriquez at snf.stanford.edu
Problem drytek2 SNF 2012-09-11 23:52:36: timer 2 can't go above 2.xx min eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-27 23:08:25: no mechanical pump or blower light on eenriquez at snf.stanford.edu
Problem drytek2 SNF 2012-09-16 22:13:47: Dropped wafer in chamber eenriquez at snf.stanford.edu
Problem drytek2 SNF 2012-08-28 10:25:25: could not pump down eenriquez at snf.stanford.edu
Problem drytek2 SNF 2012-08-29 10:06:52: System light is not on eenriquez at snf.stanford.edu
Comment drytek2 SNF 2012-08-17 13:59:27: Please put in proper standby eenriquez at snf.stanford.edu
Problem drytek2: rf power too low, franklin at snf.stanford.edu
Problem drytek2: System light burned out greene at snf.stanford.edu
Problem drytek2: grupp at snf.stanford.edu
Shutdown drytek2 SNF 2012-11-12 22:35:56: System not on jasonlin at snf.stanford.edu
Problem drytek2: RF on button burnt out. latta at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 13:44:46: coral interlock light not on when enabled lindaw at snf.stanford.edu
Problem drytek2: power mcp at snf.stanford.edu
Problem drytek2 SNF 2012-10-23 22:56:29: Pressing standby doesn't vent the chamber mdickey at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 08:30:14: CF4 mdickey at snf.stanford.edu
Shutdown drytek2 SNF 2012-11-12 22:35:56: System not on mdickey at snf.stanford.edu
Shutdown drytek2 SNF 2012-10-23 23:00:35: Pressure in standby not ~ 200mT mdickey at snf.stanford.edu
Comment drytek2 SNF 2012-11-13 09:59:50: Freon 14 mdickey at snf.stanford.edu
Problem drytek2: flowmeter michaud at snf.stanford.edu
Comment drytek2 SNF 2012-08-17 13:59:27: Please put in proper standby nxs4059 at snf.stanford.edu
Problem drytek2 SNF 2012-09-16 22:13:47: Dropped wafer in chamber ouyang at snf.stanford.edu
Shutdown drytek2 SNF 2012-08-27 23:08:25: no mechanical pump or blower light on pcristman at snf.stanford.edu
Problem drytek2 SNF 2012-08-29 10:06:52: System light is not on pcristman at snf.stanford.edu
Comment drytek2 SNF 2012-09-25 10:19:09: Please put in proper standby 2 pcristman at snf.stanford.edu
Problem drytek2: O2 MFC errorDate: Nov 17, 2000 7:28:52 PM pzwahlen at snf.stanford.edu
Problem drytek2 SNF 2012-10-22 19:49:03: can't tune forward/reverse power qran at snf.stanford.edu
Problem drytek2: top electrode, back right, plastic pin is gone sminne at snf.stanford.edu
Problem drytek2: Gives error E10 when trying to start process. Could not get standby to run! Steve sminne at snf.stanford.edu
Shutdown drytek2: Electrode cooling water at zero flow sminne at snf.stanford.edu
Problem drytek2 SNF 2012-10-23 22:56:29: Pressing standby doesn't vent the chamber suyog at snf.stanford.edu
Shutdown drytek2 SNF 2012-10-23 23:00:35: Pressure in standby not ~ 200mT suyog at snf.stanford.edu
Problem drytek2: no rf power sylviajs at snf.stanford.edu
Problem drytek2: No oxygen flow usriniva at snf.stanford.edu
Problem drytek2: cooling system not operating utkan at snf.stanford.edu
Comment drytek2 SNF 2012-11-13 17:03:30: SF6 gas was OK. xzhuan1 at snf.stanford.edu
Problem drytek2 SNF 2012-11-13 16:47:41: no SF6 flow when running prog 2 xzhuan1 at snf.stanford.edu

Last message date: Fri Jan 11 13:04:43 PST 2013
Archived on: Fri Jan 11 13:04:57 PST 2013

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