Drytek2 - read the logbook etch rate info!
booth at snf.stanford.edu
Wed Apr 12 10:38:29 PDT 2000
Drytek2 is available again - BUT -
the etch rates for the 6 electrodes are not
well matched. A poly etch rate test was done
last night by Eric P. to document the current
etch rates, and the info is posted in the
logbook at the machine. Check the data
and choose which electrodes you want to use.
When time permits (one or two months???) we
will try to do a full balancing of the poly
etch rates. We normally expect less than
10% non-uniformity between all electrodes
for poly etch.
More information about the drytek2