Shutdown, repair and upgrade

Dick Crane rcrane at
Fri Dec 13 16:41:48 PST 2002

Drytek2 users:

In an effort to eliminate electrode water leaks, we are replacing the
current electrode stack with an enhanced, upgraded version which also
has six inch capability. This upgrade will require recharacterizing the
drytek as to etch rate, across wafer uniformity and wafer to wafer

Drytek2 will be shutdown as of Wednesday, December 18. Characterization
testing will start Monday, January 6, and the tool should be up for
general use by Friday, January 10.

Sorry for any scheduling inconvenience, but the upgrade will help
increase long term up-time.



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