Drytek poly-etch using Freon-22
booth at snf.stanford.edu
Fri May 23 15:36:53 PDT 2003
Drytek users -
As you know by now, the F-115 is gone, and
has been replaced by F-22.
Jim McVittie & Henry have done characterization
of the F-22 in the poly etch process. The contact
cleanup process is not working yet - additional process
changes are being developed by Jim McVittie this weekend.
Do NOT use the contact cleanup etch in the Dryteks
until Jim has finished developing a new process.
Those of you using poly-etch recipes which now are
using F-22, a temporary multiplier must be factored into
the dial setting that you must now use for the F-22 (MFC-3).
MFC-3 flowing F-115 @ max setpoint 240= real flow of 240sccm
MFC-3 flowing F-22 @ max setpoint 240= real flow of 110sccm
Therefore those of you using F-22 in MFC-3 should
expect the setpoint range to be from 0 to 240 on the dial,
which will corespond to 0 to 110 sccm of F-22 measured flow
on the digital readout.
Examples for setting using F-22 in MFC-3:
dial setting digital flow real F-22
readout Flow sccm
240 238 110
120 119 55
060 062 27
044 044 20
030 031 13
By next week we hope to correct the old recipe spec
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