F13B1 no longer available- soon!

Nancy Latta latta at snf.stanford.edu
Wed Jun 9 11:19:35 PDT 2004

Drytek Fans,

Freon 13B1 (CF3Br), just as F115 before it, is no longer available for 
most manufacturing processes.  We are running very low on our last 
bottle of the gas.

If you use CF3Br would you please take a moment to tell us what you use 
it for and the process parameters?  We have an alternative nitride etch 
process, but need to know what other uses labmembers have for the gas.

Thank you,


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