From latta at snf.stanford.edu  Fri Apr 22 10:13:40 2005
From: latta at snf.stanford.edu (Nancy Latta)
Date: Fri, 22 Apr 2005 10:13:40 -0700
Subject: F13B1 gas no longer available
Message-ID: <426930C4.7000804@snf.stanford.edu>

Folks,

As some of you have noted, we are out of Freon 13B1.  This has long been 
expected; a message was sent out in the summer of 2004 warning users of 
the drytek etchers this would occur soon.

Well, our last tank lasted much longer than expected, but we are out of 
the gas.  F13B1 was identified as an ozone depleting material and is not 
longer manufactured for sale.

In anticipation of this a nitride recipe has been developed using SF6 
and O2.  New recipe and etchrate charts have been placed in the logbooks 
of both tools.  They will soon be posted on the web as well.

Sorry for any confusion caused by this,

-Nancy


From fengj at stanford.edu  Tue Apr 26 19:18:37 2005
From: fengj at stanford.edu (Jia Feng)
Date: Tue, 26 Apr 2005 19:18:37 -0700
Subject: Please shut down Drytek2 properly
Message-ID: <1114568317.426ef67d3b816@webmail.stanford.edu>

Hi, Drytek2 Users:

I found twice today that the white process buttons were still on when
Drytek2 is in standby and disabled on Coral. For one time I even found the
RF power was still on. Please pay enough attention to see if you shut down
Drytek2 properly. If you cannot remember the correct shut down procedure,
you can find it in the manual.

Thanks,
Jia