From ynzhao at stanford.edu Thu Mar 3 21:25:30 2005 From: ynzhao at stanford.edu (Sara Zhao) Date: Thu, 3 Mar 2005 21:25:30 -0800 Subject: FW: Drytek trick Message-ID: <200503040524.j245OoSL030678@smtp3.Stanford.EDU> Hello everyone, Since Nancy is on vacation, can anybody who knows the 'trick' I mentioned below teach me? Thanks very much, sara _____ From: Sara Zhao [mailto:ynzhao at stanford.edu] Sent: Thursday, March 03, 2005 3:19 PM To: 'latta at snf.stanford.edu' Subject: Drytek1 trick Hello Nancy, Is there a trick to purge/vent the chamber slower than normal? I have really thin and fragile legs on my wafer and need to be very careful. Beth was mentioning yesterday that there is a trick to help. May I learn it from you? Thanks very much, sara -------------- next part -------------- An HTML attachment was scrubbed... URL: