FW: Drytek trick

[Sara Zhao]

Hello everyone,

 

Since Nancy is on vacation, can anybody who knows the 'trick' I mentioned
below teach me?

 

Thanks very much,

 

sara

 

  _____  

From: Sara Zhao [mailto:ynzhao at stanford.edu] 
Sent: Thursday, March 03, 2005 3:19 PM
To: 'latta at snf.stanford.edu'
Subject: Drytek1 trick

 

Hello Nancy,

 

Is there a trick to purge/vent the chamber slower than normal? I have really
thin and fragile legs on my wafer and need to be very careful. Beth was
mentioning yesterday that there is a trick to help. May I learn it from you?


 

Thanks very much,

 

sara

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