Warning: No CF4 gas

Mary Tang mtang at stanford.edu
Sun Feb 21 05:20:15 PST 2010


Apologies everyone, but it looks like the CF4 cylinder has run dry.  
This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and lampoly.  
We will address this as soon as possible.

Your SNF Staff


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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