Warning: No CF4 gas

Mary Tang mtang at stanford.edu
Sun Feb 21 05:20:15 PST 2010

Apologies everyone, but it looks like the CF4 cylinder has run dry.  
This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and lampoly.  
We will address this as soon as possible.

Your SNF Staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

More information about the drytek2 mailing list