From snf at purkl.net Thu Dec 1 10:01:43 2011 From: snf at purkl.net (Fabian Purkl) Date: Thu, 01 Dec 2011 10:01:43 -0800 Subject: drytek2 released today (12/1) 12-1pm Message-ID: <097a3056f047ecedf3cd0a3fd5256aae-EhVcXlhARwtdRw8RGDpQCEFddQZLVF5dQUNBBjBbXkFGU1wWXl92H1RUXzBeQkcAWFxbRVhW-webmailer2@server05.webmailer.hosteurope.de> From insun at stanford.edu Sat Dec 3 01:32:28 2011 From: insun at stanford.edu (Insun Park) Date: Sat, 3 Dec 2011 01:32:28 -0800 Subject: (Dec. 3) 2:00~3:30pm reservation released (EOM) Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From lupin000 at stanford.edu Sat Dec 3 22:18:41 2011 From: lupin000 at stanford.edu (Ki Wook Jung) Date: Sat, 3 Dec 2011 22:18:41 -0800 (PST) Subject: drytek2 is down... Message-ID: <477200274.928111.1322979521942.JavaMail.root@zm05.stanford.edu> Hi all, I am really sorry to say this tragedy to you but drytek2 doesn't work. I think the pump is broken. I already reported the problem but I just mention it again in this email. I enabled drytek2 to use Isotropic Si Etch recipe for 30 seconds. First two times of operations were good but it suddenly didn't work when I tried to do the same process again. The machine keeps venting its chamber and I cannot hear any hissing sound whenever I press Cycle Start button or micro-reset button. I set the RF power level, chamber pressure, gas flow rates exactly same as the numbers in the manual but I don't know why it went down. Is there anyone who had a similar problem as this case? Thank you. Ki Wook From chen0622 at yahoo.com Mon Dec 5 07:56:23 2011 From: chen0622 at yahoo.com (c.c.) Date: Mon, 5 Dec 2011 07:56:23 -0800 (PST) Subject: Drytek2 reservation released 8:30 to 9:30 AM Message-ID: <1323100583.50879.YahooMailNeo@web161603.mail.bf1.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From lennonl at stanford.edu Mon Dec 5 13:28:35 2011 From: lennonl at stanford.edu (Lennon Yao Ting Lee) Date: Mon, 5 Dec 2011 13:28:35 -0800 (PST) Subject: Drytek2 reservation released 7pm to 9:30pm and 10:30pm to 12:30am today In-Reply-To: <1323100583.50879.YahooMailNeo@web161603.mail.bf1.yahoo.com> Message-ID: <875575641.382774.1323120515587.JavaMail.root@zm09.stanford.edu> From insun at stanford.edu Tue Dec 6 02:13:46 2011 From: insun at stanford.edu (Insun Park) Date: Tue, 6 Dec 2011 02:13:46 -0800 Subject: (Dec 6) 3:30-5:30pm time slot released (EOM) Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From xzhuang at stanford.edu Tue Dec 6 18:02:06 2011 From: xzhuang at stanford.edu (Steve Zhuang) Date: Tue, 6 Dec 2011 18:02:06 -0800 (PST) Subject: drytek2 released 6:30-8pm Message-ID: <1740192896.177808.1323223326198.JavaMail.root@zm02.stanford.edu> sorry about the late notice. Steve From gyama.snf at gmail.com Wed Dec 7 14:59:53 2011 From: gyama.snf at gmail.com (Gary Yama - SNF) Date: Wed, 7 Dec 2011 14:59:53 -0800 Subject: free 2-3pm today, took an earlier slot Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From insun at stanford.edu Thu Dec 8 16:54:17 2011 From: insun at stanford.edu (Insun Park) Date: Thu, 8 Dec 2011 16:54:17 -0800 Subject: drytek2 free from 5-6pm today Message-ID: Hi all, I took earlier slot and finished early. I released the reservation (5-6pm). best, Insun -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Thu Dec 8 19:07:59 2011 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 8 Dec 2011 19:07:59 -0800 (PST) Subject: drytek2 free from 7:30pm-9pm today (EOM) In-Reply-To: Message-ID: <1372653766.318982.1323400079821.JavaMail.root@zm06.stanford.edu> From nharjee at stanford.edu Fri Dec 9 18:10:59 2011 From: nharjee at stanford.edu (Nahid Harjee) Date: Fri, 9 Dec 2011 18:10:59 -0800 Subject: drytek2 released tonight 10:30p-11:30p Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: